Dependence of Optical Emission Spectra on Argon Gas Pressure during Modulated Pulsed Power Magnetron Sputtering (MPPMS)

Modulated pulsed power magnetron sputtering (MPPMS) of titanium was investigated as a function argon gas pressure using optical emission spectroscopy (OES). Delays in discharge and the formation comb-like current waveforms due to splitting pulsing were observed with decrease pressure. This observation corresponds evolution from MPPMS condition deep-oscillation-magnetron-sputtering (DOMS)-like by changing The intensities ionic species (Ar+ Ti+) increased formed decreasing Ar behavior showed marked contrast that neutral (Ar Ti). dependence OES revealed be plasma build-up stage, which is initial generation process dc sputtering, temporal profile for atomic-line optically emitting DOMS-like plasmas.